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Catalytic oxidation of InP

Identifieur interne : 002623 ( Chine/Analysis ); précédent : 002622; suivant : 002624

Catalytic oxidation of InP

Auteurs : RBID : Pascal:97-0017282

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Pascal:97-0017282

Le document en format XML

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<title xml:lang="en" level="a">Catalytic oxidation of InP</title>
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<name sortKey="Wei, J" uniqKey="Wei J">J. Wei</name>
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<s1>Microelectronics Center, School of Electrical & Electronic Engineering, Nanyang Technological University</s1>
<s3>SGP</s3>
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<country>Singapour</country>
<wicri:noRegion>Microelectronics Center, School of Electrical & Electronic Engineering, Nanyang Technological University</wicri:noRegion>
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<s1>Institute of Semiconductors, Chinese Academy of Sciences</s1>
<s2>Beijing</s2>
<s3>CHN</s3>
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<country>République populaire de Chine</country>
<placeName>
<settlement type="city">Pékin</settlement>
</placeName>
</affiliation>
<affiliation wicri:level="1">
<inist:fA14 i1="03">
<s1>Crystal Growth Center, Anna University</s1>
<s2>Madras</s2>
<s3>IND</s3>
</inist:fA14>
<country>Inde</country>
<wicri:noRegion>Madras</wicri:noRegion>
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</author>
<author>
<name sortKey="Ahn, J" uniqKey="Ahn J">J. Ahn</name>
</author>
<author>
<name sortKey="Liu, X" uniqKey="Liu X">X. Liu</name>
</author>
<author>
<name sortKey="Sankaranayanan, K" uniqKey="Sankaranayanan K">K. Sankaranayanan</name>
</author>
<author>
<name sortKey="Hing, C L" uniqKey="Hing C">C. L. Hing</name>
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<idno type="inist">97-0017282</idno>
<date when="1996">1996</date>
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<term>Binary compound</term>
<term>Catalytic reaction</term>
<term>Chemical polishing</term>
<term>Experimental study</term>
<term>Indium Phosphides</term>
<term>Mechanical polishing</term>
<term>Oxidation</term>
<term>Wafer</term>
</keywords>
<keywords scheme="Pascal" xml:lang="fr">
<term>Etude expérimentale</term>
<term>Réaction catalytique</term>
<term>Oxydation</term>
<term>Indium Phosphure</term>
<term>Composé binaire</term>
<term>Polissage chimique</term>
<term>Polissage mécanique</term>
<term>Pastille électronique</term>
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<s1>Catalytic oxidation of InP</s1>
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<s3>SGP</s3>
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<fA14 i1="02">
<s1>Institute of Semiconductors, Chinese Academy of Sciences</s1>
<s2>Beijing</s2>
<s3>CHN</s3>
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<fA14 i1="03">
<s1>Crystal Growth Center, Anna University</s1>
<s2>Madras</s2>
<s3>IND</s3>
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<s2>K73-K77</s2>
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<s1>1996</s1>
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<s0>ENG</s0>
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<s1>© 1997 INIST-CNRS. All rights reserved.</s1>
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<s0>97-0017282</s0>
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<s5>01</s5>
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<s5>01</s5>
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<s5>01</s5>
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<s0>Réaction catalytique</s0>
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<s0>Oxidation</s0>
<s5>04</s5>
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<fC03 i1="03" i2="X" l="GER">
<s0>Oxidation</s0>
<s5>04</s5>
</fC03>
<fC03 i1="03" i2="X" l="SPA">
<s0>Oxidación</s0>
<s5>04</s5>
</fC03>
<fC03 i1="04" i2="X" l="FRE">
<s0>Indium Phosphure</s0>
<s1>ENT</s1>
<s2>NC</s2>
<s2>NA</s2>
<s5>05</s5>
</fC03>
<fC03 i1="04" i2="X" l="ENG">
<s0>Indium Phosphides</s0>
<s1>ENT</s1>
<s2>NC</s2>
<s2>NA</s2>
<s5>05</s5>
</fC03>
<fC03 i1="04" i2="X" l="SPA">
<s0>Indio Fosfuro</s0>
<s1>ENT</s1>
<s2>NC</s2>
<s2>NA</s2>
<s5>05</s5>
</fC03>
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<s0>Composé binaire</s0>
<s5>06</s5>
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<s0>Binary compound</s0>
<s5>06</s5>
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<s0>Compuesto binario</s0>
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<s5>08</s5>
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<fC03 i1="06" i2="X" l="ENG">
<s0>Chemical polishing</s0>
<s5>08</s5>
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<fC03 i1="06" i2="X" l="GER">
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<s0>Pulido químico</s0>
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<s0>Polissage mécanique</s0>
<s5>09</s5>
</fC03>
<fC03 i1="07" i2="X" l="ENG">
<s0>Mechanical polishing</s0>
<s5>09</s5>
</fC03>
<fC03 i1="07" i2="X" l="GER">
<s0>Mechanisches Polieren</s0>
<s5>09</s5>
</fC03>
<fC03 i1="07" i2="X" l="SPA">
<s0>Pulido mecánico</s0>
<s5>09</s5>
</fC03>
<fC03 i1="08" i2="X" l="FRE">
<s0>Pastille électronique</s0>
<s5>10</s5>
</fC03>
<fC03 i1="08" i2="X" l="ENG">
<s0>Wafer</s0>
<s5>10</s5>
</fC03>
<fC03 i1="08" i2="X" l="SPA">
<s0>Pastilla electrónica</s0>
<s5>10</s5>
</fC03>
<fC07 i1="01" i2="X" l="FRE">
<s0>Métal groupe IIIB Composé</s0>
<s2>NC</s2>
<s2>NA</s2>
<s5>07</s5>
</fC07>
<fC07 i1="01" i2="X" l="ENG">
<s0>Group IIIB metal Compounds</s0>
<s2>NC</s2>
<s2>NA</s2>
<s5>07</s5>
</fC07>
<fC07 i1="01" i2="X" l="SPA">
<s0>Metal grupo IIIB Compuesto</s0>
<s2>NC</s2>
<s2>NA</s2>
<s5>07</s5>
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<fN21>
<s1>006</s1>
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   |wiki=   *** parameter Area/wikiCode missing *** 
   |area=    IndiumV3
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   |étape=   Analysis
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   |clé=     Pascal:97-0017282
   |texte=   Catalytic oxidation of InP
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